Electron Density with Radial Distance in RF Glow Discharge Plasma Using Langmuir Probe
نویسندگان
چکیده
منابع مشابه
Double Langmuir probe measurement of plasma parameters in a dc glow discharge
In this paper, plasma main characteristics such as electron mean temperature, electron number density, and oscillation frequency have been measured experimentally using the double Langmuir probe diagnostic system. In our experiment, the plasma was generated by applying the low pressure dc glow discharge in several common gases. The experimental results indicated the highest plasma density and o...
متن کاملAnalysis of Langmuir Probe Characteristics for Measurement of Plasma Parameters in RF Discharge Plasmas
A simple method for measuring RF plasma parameters by means of a DC-biased Langmuir probe is developed. The object of this paper is to ensure the reliability of this method by using the other methods with different principles. First, Langmuir probe current e I response on RF voltage p1 V superimposed to DC p V biased probe was examined in DC plasmas. Next, probe current response of DC biased pr...
متن کاملSimulation and Model Reduction Methodsfor an RF Plasma Glow Discharge
In this paper, we report on numerical solutions and model reduction results for a plasma glow discharge model with a radio frequency ionization source. A pseudospectral implementation of a global spectral method was found to give accurate simulation results that correctly reflected the expected physical behavior of an argon plasma under the simulated operating conditions. Numerical residual ana...
متن کاملInfluence of O2 and N2 Concentrations on the Characteristics of Plasma in DC Cylindrical Magnetron Discharge by Langmuir Probe
Using the Langmuir probe method, the reactive plasma parameters were studied in different ratios of oxygen and nitrogen concentrations in a DC cylindrical discharge device.The plasma parameters such as plasma potential, electron density and electron temperature wereextracted from the current-voltage characteristic’s curve of Langmuir probe to find the optimum conditions for deposit the oxy...
متن کاملElectron density fluctuations in a dusty Ar/SiH4 rf discharge
• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website. • The final author version ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Physics and Chemistry of Materials
سال: 2014
ISSN: 2348-6341
DOI: 10.15449/jpcm.2016.1005